MEMS is called Micro Electromechanical System. It is a high-tech device with a size of several millimeters or even smaller, and its internal structure is generally in the micron or even nanometer scale, which is an independent intelligent system. Mainly by the sensor, actuator (actuator) and micro-energy three major components. MEMS involves a variety of disciplines and engineering technologies such as physics, semiconductors, optics, electrical engineering, chemistry, materials engineering, mechanical engineering, medicine, information engineering and bioengineering, and opens up a wide range of uses in the fields of intelligent systems, consumer electronics, wearable devices, smart homes, synthetic biology and microfluidics for systems biotechnology. Common products include MEMS accelerometers, MEMS microphones, micro-motors, micro-pumps, micro-vibrators, MEMS pressure sensors, MEMS gyroscopes, MEMS humidity sensors, etc. and their integrated products.
MEMS is a stand-alone intelligent system that can be mass-produced, with system dimensions in the order of a few millimeters or even smaller, and with internal structures typically in the micron or even nanometer scale. For example, common MEMS products are generally 3mm x 3mm x 1.5mm in size or even smaller.
Microelectromechanical systems in the national economy and military systems will have a wide range of applications. The main civilian areas are electronics, medical, industrial, automotive and aerospace systems.
In summary, MEMS has the following basic features, miniaturization, intelligence, multifunctionality, high integration and suitable for mass production.The goal of MEMS technology is to explore components and systems with new principles and functions through system miniaturization and integration. MEMS technology is a typical multidisciplinary cross cutting-edge research field, involving almost all fields of natural and engineering sciences, such as electronics, mechanical technology, physics, chemistry, biomedicine, materials science, energy science, etc.. effects, surface effects of microstructures, microscopic friction mechanisms, etc., so it is necessary to conduct in-depth research on microdynamics, microhydrodynamics, microthermodynamics, microtribology, micro-optics and microstructures. Although this aspect of the research has been emphasized, it is difficult and often requires scholars from multiple disciplines to carry out basic research.2. Technological basic research: it mainly includes technological basic research on micromechanical design, micromechanical materials, microfabrication, micro-assembling and encapsulation, integration technology, micro-measurement and so on.3. Applied research on micromechanics in various disciplinary fields.
The United States has successfully developed for automobile collision avoidance and fuel saving microelectromechanical system accelerometer and sensor, can improve the safety of the car, fuel saving 10%. Only this one U.S. Department of Defense system can save billions of dollars a year in gasoline costs. The application of MEMS in aerospace systems can result in significant cost savings and increased system flexibility and will lead to changes in aerospace systems. In military applications, the U.S. Department of Defense Advanced Research Projects Agency is the application of microelectromechanical systems in personal navigation with small inertial measurement devices, high-capacity data storage devices, small analytical instruments, medical sensors, fiber-optic network switches, environmental and security monitoring with distributed unattended sensing and other aspects of the research. The Directorate has demonstrated MEMS-based fabrication of accelerometers that can withstand an impact force of nearly 10.5 gravitational accelerations generated by artillery firing, which could provide an economical guidance system for unguided munitions. Other military applications envisioned for MEMS include chemical warfare agent alarms, enemy identification devices, dexterous skins, and distributed battlefield sensor networks.