Dust particles maximum allowable number (per cubic meter);
The number of particles larger or equal to 0.5 microns can not exceed 3500000, the number of particles larger or equal to 5 microns can not exceed 20,000;
Microorganisms maximum allowable number;
100 Class 10,000 clean room standard is that the number of planktonic bacteria can not exceed 500 per cubic meter;
Sedimentation bacteria can not exceed 10 per petri dish.
Differential pressure: the same cleanliness level of the clean room pressure difference to maintain the same, for different cleanliness levels of the pressure difference between neighboring clean rooms to be ≥ 5Pa, clean rooms and non-clean rooms to be ≥ 10Pa.
100,000 clean room temperature, humidity, no special requirements, in order to wear clean clothes do not produce a sense of comfort is appropriate, the temperature is generally controlled in the fall and winter 20 ~ 22 ℃; spring and summer 24 ~ 26 ℃; fluctuations ± 2 ℃. Fall and winter clean room air humidity control in 30-50%, spring and summer clean room air humidity control in 50-70%.
Power distribution: clean room (area) of the main production of the general illumination value should be ≥ 300Lx; auxiliary studio, personnel clean and material clean room, airlock room, aisle, etc., the illumination value should be 200-300Lx.
Noise control
One, the dynamic detection, the 10,000 clean room noise level should not be exceeded by 70 dB A.
The noise level should not exceed 70 dB A.
The noise level should not exceed 70 dB A.
Another, the static detection, the noise level should not be exceeded by 70 dB A. Second, when static testing, the noise level of 10,000-class turbulent flow clean room can not exceed 60 dB A.
Airflow organization
100,000-class clean room is mainly used in the air supply mode;
1, local hole plate ceiling air supply;
2, with diffusion plate high-efficiency air filters ceiling air supply;
3, the upper side of the wall air supply and so on three kinds of air supply mode.
100,000 clean room mainly used return air;
1, single side of the lower wall arrangement of the return air outlet;
2, when the use of the aisle return air, in the aisle uniform arrangement of the return air outlet or at the end of the aisle centralized set the return air outlet.
Air supply outlet wind speed meters per second:
1, orifice plate orifice 3~5;
2, side air supply outlet:
(1) adhering to the jet 2~5;
(2) non-adhering to the jet with the lower part of the side wall air return 1.5~2.5, to the lower part of the side wall air return 1.0~1.5.
Return air outlet wind speed (m / s):
1, without the aisle return air outlet or centralized return air outlet at the end of the aisle. p>
1, the clean room return air outlet does not exceed 2;
2, the return air outlet in the aisle does not exceed 4.