China's lithography immersion system in the do: Zhangjiang High-tech, Torchlight Technology, Fu Chuang Precision, Shanghai Microelectronics Equipment, Hefei Core Semiconductor Co.
1, Zhangjiang Hi-Tech
Shanghai Pudong New Area directly under the state-owned listed companies, cultivated and incubated only Jiechuangxin, Yingjie core, Sai micro microelectronics, cloud from the science and technology, Yifang Biological and United Medical Science and Technology Board listed companies. Meanwhile, the company holds a 10.779% stake in Shanghai Microelectronics, a domestic high-end lithography company.
2, Torchlight Technology
The strongest domestic brand of high-power semiconductor lasers, the company focuses on semiconductor lasers, laser optics business. The company's light field homogenizer with excellent performance, applied to the main domestic lithography R & D projects and prototypes, and into the supply chain of Asmax, TSMC.
3, Fu Chuang Precision
Domestic semiconductor equipment precision parts leader, the main process components, structural components, module products and gas piping, is the world's few capable of mass production of 7 nm process parts manufacturers. Has long entered the supply chain of overseas head manufacturers, confirming the company's strong product and technical capabilities.
4, Shanghai microelectronics equipment
Limited lithography is mainly used for a wide range of applications in integrated circuit front-end, advanced packaging, FPD, MEMS, LED, power devices and other manufacturing areas, shipments in 2018 is about 60 units. Operating income is not announced, the government is heavily subsidized. The best performance of the photolithography machine that has been mass-produced by Shanghai Microelectronics Equipment Co. Ltd. in the technological lead is the 90nm photolithography machine, and the gap in the process is so large that the high-end photolithography machine required by domestic wafer fabs is completely dependent on imports.
5, Hefei Core Semiconductor Co., Ltd
Established in April 2006, is the first domestic semiconductor direct-write lithography equipment manufacturers. The company independently developed ATD4000, has realized the highest 200nm mass production.
6, first Teng photoelectric
Established in April 2013, has realized the highest 200nm mass production, in the 2014 International Semiconductor Equipment and Materials Exhibition, first Teng photoelectric brightened up the completely independent intellectual property rights of the LED photolithography production technology, shocked the four seats.
Reference: Baidu Encyclopedia - Hefei Xinshuo Semiconductor Co.