(1) The solid metal elements (including carbon) on the periodic table can generate a strong beam of 1 mA;
(2) ion purity depends on the purity of cathode material, so it can achieve high purity, and at the same time, it can save expensive and complicated mass analyzer;
(3) Metal ions generally have several charge states, so that higher ion energy can be obtained with lower extraction voltage, and superposition (ion implantation) of several energies can be realized with one extraction voltage;
(4) The beam is divergent, which can save the beam constraint and scanning system and achieve a large implantation area. Its revolution is mainly manifested in two aspects, one is its high performance, the other is to greatly simplify the structure of the ion implanter, which is mainly composed of ion source, target chamber and vacuum system. With the strong support of the National 863 Program, after more than ten years of research and development, the surface technology of metal ion implantation with M EVVA source has made important breakthroughs and progress in both hardware (equipment) and software (process), and has the foundation for industrialization. In terms of equipment, three different types of M EVVA sources, M EVVAIIA-H, MEVVAII-B and MEVVA5, have been developed, and their main performance has reached the international advanced level. During the Ninth Five-Year Plan period alone, 15 M EVVA source ion implanters or M EVVA source coating equipment have been produced for universities, research institutes and factories in Taiwan Province, Hongkong and China.
the application of mevva source ion implanter makes high-current metal ion implantation simpler, more economical and greatly improves the efficiency, which is very beneficial to the industrialization of this high technology. In terms of surface optimization technology, the surface treatment of 7 varieties of steel cutting tools, dies and precision motion coupling parts by M EVVA source ion implantation has achieved remarkable optimization effect of prolonging life by 3-3 times, and has passed the technical appraisal of national ministries and commissions, and the results are at the international advanced level. The superiority, practicability and broad market prospect of this high-tech surface treatment technology have been appreciated by more and more departments and units and have been widely used. According to years of research and development, and drawing lessons from the new progress in the world, M EVVA source metal ion implantation is especially suitable for the surface treatment of the following types of tools and parts:
(1) Metal cutting tools (including various tools such as drilling, milling, turning and grinding used in precision machining and numerical control machining, and cemented carbide tools) can generally improve the service life by 3-1 times;
(2) hot extrusion and injection molding can reduce energy consumption by about 2% and prolong service life by about 1 times;
(3) precision motion coupling components, such as the stator and rotor of the air pump, the cam and clamping plate of the gyroscope, the piston, the bearing, the gear and the turbine scroll bar, can greatly reduce the friction coefficient, improve the wear resistance and corrosion resistance, and prolong the service life by more than 1 times at most;
(4) The precision nozzle for extruding synthetic fiber and optical fiber can greatly improve its abrasion resistance and service life;
(5) Precision molds in the semiconductor industry, stamping and stamping molds in the can industry, etc., can significantly improve the working life of these precious and precise molds;
(6) Medical orthopedic repair parts (such as titanium alloy artificial joints) and surgical instruments have very good economic and social benefits. This high-tech industry is in the ascendant, the processing capacity and efficiency of hardware equipment need to be further improved, and the software (ion implantation material surface modification technology) needs to be further deepened and refined, and its application scope needs to be continuously expanded.
overview of development at home and abroad. I SM Tech. of the United States is a professional company that produces M EVVA source ion implanters internationally, and it is in the international leading position in comprehensive technical level. Since 199s, several different types of commercial M EVVA source ion implanters have been developed and produced. A multi-M EVVA source ion implanter is equipped with four AVIS8-75MEV- VA sources in a vacuum chamber, with a total beam current of 3mA and a total beam spot area of 12, cm2. It is the strongest M EVVA source ion implanter in the world at present. The ion implantation surface treatment technology, a new industry in developed countries in Europe and America, is developing well, such as S PIRE and ISM Tech. in the United States, A EA Industrial Tech. in the United Kingdom, Tec Vac and Tech-Ni-Plant, N itruvid and IBS in France, INASMET and AIN in Spain, M AT in Germany and D TI Tribology Centre in Denmark, etc., which have achieved considerable economic and social benefits and played a good demonstration role. They have reduced the cost of metal ion implantation to $.5-.5/cm2, which can be accepted by a wide range of fields and departments including medical care, aviation, aerospace, machinery and so on.