MEMS chip means Micro-Electro-Mechanical Systems (MEMS) chip, also known as MEMS integrated circuit.
It is a chip that integrates Micro-Electro-Mechanical Systems (MEMS) technology on which functions such as tiny-sized mechanical structures, sensors and actuators can be realized.
Simply put, a MEMS chip is a chip that combines miniature mechanical structures with electronic components. It fabricates tiny mechanical parts on the surface of the chip through micro- and nanofabrication techniques and interconnects them with circuit elements. These tiny mechanical structures can realize functions such as sensing, measuring, controlling and actuating.
MEMS technology combines micro- and nano-fabrication technology, sensor technology, and integrated circuit technology to make it possible to realize tiny mechanical structures on a chip. These tiny mechanical structures can be cantilever beams, micro-motors, micro-lenses, micro-nozzles, etc., having dimensions typically between micrometers and millimeters.
MEMS chips are usually made from silicon-based materials because silicon has good mechanical properties and sophisticated microfabrication processes. The process of fabricating MEMS chips includes steps such as photolithography, thin film deposition, ion etching and etching, through which tiny structures can be precisely built on the chip.
MEMS chips not only contain tiny mechanical structures, but also integrate corresponding electronic components. For example, sensors can convert mechanical variables (such as pressure, temperature, humidity, etc.) into electrical signals, and actuators can drive the movement of the mechanical structure based on the electrical signals. Circuits on the chip can be used for functions such as signal processing, control and communication.
MEMS chip use:
1, mobile devices: MEMS chips play an important role in mobile devices. Accelerometers and gyroscopes are one of the most common MEMS sensors, which are used to detect changes in acceleration and orientation of the device, and to realize functions such as automatic screen rotation, gesture recognition, and game control. In addition, MEMS microphones are used to enable noise suppression and speech recognition.
2, the automotive field: MEMS chip in the car has a variety of applications. For example, accelerometers and pressure sensors in airbag systems are used to detect collisions and trigger airbag deployment. Inertial navigation systems use MEMS gyroscopes and accelerometers to provide vehicle attitude and navigation information. In addition, pressure sensors, flow meters and temperature sensors are widely used in engine management systems and air conditioning systems in vehicles.
3, medical equipment: MEMS chips play an important role in the medical field. Biosensors are one of the key applications and can be used to monitor various indicators in living organisms, such as blood pressure, blood sugar and heart rate. In addition, MEMS chips are used in drug release systems to precisely control the release rate and dosage of drugs for the treatment of cancer, diabetes and other diseases.
4, industrial control: MEMS chips play an important role in industrial control and automation systems. Pressure sensors, accelerometers and tilt sensors can be used to monitor the status of machines and equipment for troubleshooting and predictive maintenance. In addition, MEMS flow meters and gas sensors are widely used in industrial process control and environmental monitoring.
5, consumer electronics: In addition to mobile devices, MEMS chips also have a variety of applications in consumer electronics. For example, optical stabilization technology uses MEMS gyroscopes to counteract jitter in handheld devices and improve the quality of photos and videos.MEMS acoustic devices are also used in audio devices such as speakers and microphones to provide a better audio experience.
6. Environmental monitoring: MEMS chips can be used to monitor environmental parameters such as temperature, humidity and gas concentration. These sensors are widely used in the field of environmental monitoring for indoor air quality monitoring, meteorological observations, environmental pollution monitoring, etc. The miniaturization and low-power characteristics of MEMS chips make them ideal for deployment in sensor networks in a wide range of areas.