The full name of MEMS is Micro? Electromechanical? System, machinery? System, MEMS. The internal structure of high-tech equipment with a size of no more than a few millimeters is generally an independent intelligent system in micron or nanometer scale, which is mainly composed of three parts: sensor, actuator and micro-energy.
Electromechanical system covers physics, information engineering, bioengineering and other disciplines and engineering technology. , and has developed a wide range of applications for intelligent systems, consumer electronics, wearable devices, smart homes, synthetic biology of system biotechnology and microfluidic technology.
System advantages of MEMS:
Micro-electro-mechanical systems (MEMS) integrate microcircuits and micromechanics on one chip according to functional requirements. Since it rose in the middle and late 1980s, it has developed very rapidly, and it is considered as another technical field that has great influence on national economy and military affairs after microelectronics.
Micro-electro-mechanical systems are usually used in automobile airbags first, and then widely used in various fields of automobiles in the form of MEMS sensors. With the development of MEMS technology and the characteristics of "light, thin, short and small" application terminals, the demand for small high-performance MEMS products has surged, and MEMS products have appeared in electronic consumption, medical care and other fields.