1, the operator of this equipment must first go through the pre-service safety training, familiar with the knowledge of safe operation, and qualified by the examination.
2, the equipment must be placed in a well-ventilated place, the roof must be installed explosion-proof ventilation fan.
3, equipment around the fire or other unsafe factors, please immediately stop and close all import and export valves.
4, there is high pressure in the electric control box, non-electrician please do not open the door of the electric control box, in order to avoid electric shock.
5, with compressed air leakage test, the pressure shall not exceed 0.4MPa in order to avoid the flowmeter glass broken.
A, ammonia decomposition of hydrogen
Two, ammonia decomposition principle:
1 mole of ammonia (gaseous) at a certain pressure and temperature and nickel catalyst catalytic effect, can be decomposed into 3/2 mole of hydrogen and 1/2 mole of nitrogen, and absorbs a certain amount of heat. Its chemical equation is as follows:
2NH3 catalyst 3H2 ＋N2-Q
After decomposition of hydrogen, nitrogen mixture using the principle of variable temperature adsorption and regeneration, through the 13X molecular sieve bed adsorption of water and residual ammonia therein, and to maintain its properties unchanged, so as to achieve the purpose of drying and purification, and 13X molecular sieve is heated and rinsed by the purification gas, The 13X molecular sieve is heated, rinsed with purification gas, desorbed by the molecular sieve adsorption of water, residual ammonia, so as to achieve the purpose of regeneration and reuse.
Third, the advantages of ammonia decomposition of hydrogen:
The gas obtained by this method is a good protective gas, which can be widely used in the semiconductor industry, metallurgical industry, as well as other industries and scientific research that require a protective atmosphere.
Ammonia decomposition to produce protective gases in the industry is very easy to realize, this is because:
1, ammonia easy to decompose: decomposition pressure is not high, in the catalyst, the temperature control in the 800-850 ℃ when the ammonia can be most of the solution, the decomposition rate of up to 99.9%.
2, easy to refine the gas: as raw material for the liquid ammonia, purity is very high, in which the volatile impurities are only a small amount of inert gas dissolved in liquid ammonia and water, almost no oxygen, at the same time, in this condition, ammonia decomposition is irreversible. It can be seen that the ammonia decomposition gas by 13X molecular sieve bed adsorption can be removed from the water, the dew point of -60 ℃, residual ammonia is less than 5PPM that is the refined hydrogen-nitrogen mixture, so that the semiconductor industry does not want to realize the existence of harmful non-metallic elements. Such as: chlorine and oxygen.
3, in our country, the raw material liquid ammonia is easy to get, inexpensive, and the consumption of raw materials is relatively small (each kilogram of ammonia can produce 2.5Nm3 gas mixture).
Fourth, ammonia decomposition process:
Liquid ammonia after depressurization through the carburetor vaporized into gaseous ammonia (80 ℃ circulating water in the outer water jacket of the carburetor), the vaporization of high-pressure gas ammonia and then through the carburetor after the stage of depressurization, and then sent to the heat exchanger into the decomposition furnace, the decomposition furnace is equipped with activated nickel touch coal, decomposition in the temperature of 800 ℃ to 850 ℃, decomposition of high-temperature After decomposition, high temperature gas is exchanged with gaseous ammonia in the heat exchanger, at this time, the decomposition gas is cooled down, and the gaseous ammonia recovers the heat and warms up and enters into the decomposition furnace to decompose, the decomposition gas after heat exchange enters into the deaerator to further remove the trace oxygen, and then cools down in the cooler, and then enters into the drier (13X molecular sieve bed) to remove the residual water and other impurities. Its purity can reach as follows: dew point: -60℃, residual ammonia below 5PPM. The dryer is generally set up two, one will be sent to the decomposition of gas adsorption, drying sent to the point of use, the other to take a portion of the drying of the qualified gas through the regeneration of heating (generally in the 250 ~ 300 ℃) to release the water and residual ammonia, the two alternating (a work a regeneration) to use so as to achieve the effect of repeated use.
V. Technical indicators:
1, ammonia decomposition of the rated gas production: 50Nm3 / h (25% N2, 75% H2)
2, proportioning device rated gas production: 50Nm3 / h
3, ammonia decomposition of the purity of the gas: dew point ≤ -60 ° C, residual ammonia ≤ 5PPM
4, decomposition of the furnace temperature: 800 -850 ° C
4, decomposition of the furnace operation: 800 -850℃
5, the decomposition furnace rated power: 60KW (voltage: 380V, 50Hz)
6, the dryer rated power: 3.6KW, voltage 220V (a group of work and another group of regeneration or standby)
7, the rated ammonia consumption: 20Kg / h
8, ammonia decomposition pressure: <0.09MPa
9, drying gas purity: dew point ≤ -60 ℃, residual ammonia ≤ 5PPM
5, the decomposition of gas purity: dew point ≤ -60℃, residual ammonia ≤ 5PPM
9, dryer working temperature: room temperature
10, dryer regeneration temperature: 250-300 ℃
11, dryer working cycle: 24h
12, ammonia decomposition device weight of about 4T
six, ammonia decomposition with purification device:
1, the original drive:
1) carefully read the instruction manual, familiar with the device
1) carefully read the instruction manual, familiar with the device
1) read the instruction manual, familiar with the device
1) carefully read the instructions for the use of the equipment. instruction manual, familiar with the principle and structure of the equipment.
2) Check whether the gas and electricity systems are smooth, eliminate bubbles, bubbles, points, leaks, and turn on the power.
3) nickel catalyst activation: the catalyst installed in the decomposition furnace in the factory has been restored, but because of the equipment in the transportation, inventory period there is always moisture, oxygen and other solutions into the catalyst activity is slightly reduced, so the original drive to the activation of the catalyst.
4) catalyst activation operation is as follows: turn on the power, close the ammonia decomposition valve, the equipment began to warm up, this time to open the venting valve and check the gas in the equipment due to thermal expansion and whether the venting, warming to 500-600 ° C, through a small amount of ammonia gas pressure, replacement, and incomplete ammonia decomposition, because ammonia decomposition is a heat-absorbing reaction, so as to achieve the decomposition of the furnace to control the temperature rate, to prevent damage to the equipment due to the temperature rate is too fast. speed is too fast to prevent damage to the equipment. In the activation process, the amount of ammonia and warming process is as follows:
Temperature range (℃) Rising temperature and holding time (h) Decomposition furnace flow rate (m3/h)
Room temperature-200 ℃ 2 0
200-500 ℃ 3 0
500-600 ℃ 3 1-10
600-700 ℃ 3 10-15
700-700 ℃ 3 10-15
700-700 ℃ 3 10-15
700-700 ℃ 3 10-10
700-700 ℃ 3 10-15
700-750℃ 3 15-30
750-850℃ 3 30-50
Sample gas test: chemical analysis or empirical methods can be used, of which empirical methods are, from the venting mouth can not smell obvious ammonia odor or observation of decomposition of the gas combustion flame orange, if the above phenomena are in line with the decomposition of the gas is qualified, qualified, you can both close the venting valve, open the decomposition of gas After qualified, you can close the air release valve, open the decomposition gas outlet valve, work Ⅱ inlet valve, work Ⅱ out of the valve, through the flowmeter into the back stage purification, this time the flow size according to the actual situation, adjust the ammonia pressure to control the decomposition of gas flow.
5) 13X molecular sieve activation regeneration in the dryer: ammonia decomposition drive normal, take a small portion of qualified decomposition gas into the "dryer Ⅱ", adsorption drying of water, residual ammonia (at low load work), the use of this gas to heat the rinse "dryer Ⅰ" in the 13X molecular sieve, "the dryer Ⅰ" in the 13X molecular sieve to heat the rinse. "13X molecular sieve in the dryer, at this time, the dryer temperature selector switch to 1 group, this part of the gas through the" venting valve "venting. Specific operations are as follows:
Open the "decomposition of gas outlet valve" "work Ⅱ in", "work Ⅱ out," "regeneration valve Open "decomposition gas outlet valve", "work Ⅱ in", "work Ⅱ out", "regeneration valve", "regeneration Ⅰ in", "regeneration Ⅰ out", "venting valve" and adjust the regeneration flow rate of about 5m3/h. Set the dryer heating selector switch to Ⅰ group, and the heating process is very simple. Ⅰ group, the warming process is as follows:
Temperature range (℃) Warming up and holding time
Room temperature-100 2
100-200 2
250-300 4
6) dryer Ⅰ activation (regeneration) at the end of the end of all the valves remain unchanged, the system in the dryer temperature reaches the specified temperature will automatically be transferred to the cooling state. State, and can continue to use the dryer Ⅱ purified by the small amount of air blowing cold "dryer Ⅰ" to room temperature (can also let the "Ⅰ group of dryer" natural cooling to room temperature); and then close the "work Ⅱ into the", "work Ⅱ into the ", "work Ⅱ out", "regeneration valve" "regeneration Ⅰ in", "regeneration Ⅰ out " and "venting valve", Ⅰ group dryer can be put into normal operation.
7) Ⅱ group dryer re-life the same steps and Ⅰ group dryer activation, but the valve is changed to "work
work Ⅰ in", "work Ⅰ out", "regeneration valve" "regeneration valve", "regeneration valve", "regeneration valve", "regeneration valve", "regeneration valve", "regeneration valve", "regeneration valve", "regeneration valve". ""Regeneration Ⅱ into", "regeneration Ⅱ out" and "venting valve". And the dryer selector switch to Ⅱ group
2, normal operation:
Ammonia decomposition part:
1) Turn on the power, adjust the temperature of the temperature controller (specific operation, please refer to the temperature controller instruction manual) decomposition of the furnace temperature rose to 800-850 ℃.
2) open the ammonia bottle, adjust the vaporizer front regulator, so that the liquid ammonia into the vaporizer for vaporization, and then adjust the vaporizer rear regulator (general pressure: can be used for the upper and lower levels of gas until, but the front can not be more than 6 kilograms, the rear can not be more than 3 kilograms).
3) through the ammonia venting: open the venting valve, and then slowly open the ammonia valve. Vaporized gas ammonia into the heat exchanger, in the heat exchanger decomposition gas and gas ammonia heat exchange, and then into the decomposition furnace for decomposition. About half an hour of emptying (emptying flow rate of about 20m3h).
4) About half an hour after emptying, through the sampling port sampling test, such as decomposition gas qualified, you can close the air release valve, open the decomposition gas valve, to the rear purification device to send out qualified decomposition gas.
Purification part:
5) Dryer Ⅰ group work, Ⅱ group regeneration steps:
Open the "decomposition gas outlet valve" "work Ⅰ inlet valve", "work Ⅰ out valve
Open "decomposition gas outlet valve", "work Ⅰ inlet valve", "work Ⅰ out valve", "pure gas outlet valve", purified gas can be sent to the point of use; and open the "regeneration Ⅱ inlet valve", "regeneration Ⅱ out valve", 'regeneration valve', 'regeneration valve', 'regeneration valve'. 'Regeneration valve' will regenerate the flow rate to about 5m3/h, and then dial the dryer heating selector switch to group Ⅱ and adjust the temperature controller to 250~300℃. According to the dryer warming activation process is carried out, the Ⅱ group dryer warming regeneration.
6) purification device Ⅰ group work, Ⅱ group blowing cold steps:
Ⅰ group work is still operating according to the original operating valves, Ⅱ group regeneration to the temperature, the system will automatically transfer to the cooling state of all the valves switching state remains unchanged, and continue to blow the cold to room temperature.
7) purification device Ⅱ group work, Ⅰ regeneration steps:
Open the "work Ⅱ inlet valve", "work Ⅱ out valve", "pure gas outlet valve", and adjust the pure gas flow to the use of the gas, the gas flow to the use of the gas, the gas flow to the use of the gas, the gas flow to the use of the gas, the gas flow to the use of the gas. Open the "WorkⅡinlet valve", "WorkⅡoutlet valve" and "Pure gas outlet valve", and adjust the pure gas flow, and send gas to the point of use. And open the "regeneration valve", "regeneration Ⅰ inlet valve", "regeneration Ⅰ out valve" and adjust the regeneration flow rate to 15m3 / h, the power selector switch to Ⅰ group, adjust the temperature control instrument to 250～300℃.
8) purification device Ⅱ group work, Ⅰ group blowing cold steps:
Ⅱ group work is still operating according to the original operating valve operation. Ⅰ group regeneration after the end of warming, the system will automatically transfer to the cooling state. All valves switch state unchanged, continue to blow cold to room temperature. Then turn to the next cycle.
3, shutdown: cut off the main power, close all the import and export valves.
If there is a need for service: consult with Mr. Zhang zhanglongting@126.com