Vacuum pump is a device that generates, improves and maintains vacuum in a closed space by various methods. A vacuum pump can be defined as a device or equipment that uses mechanical, physical, chemical or physico-chemical methods to evacuate a container to obtain a vacuum. With the development of vacuum application, there are more and more kinds of vacuum pumps, and their pumping speed ranges from tens of liters per second to hundreds of thousands and millions of liters per second. The extreme pressure (extreme vacuum) ranges from coarse vacuum to ultra-high vacuum above 10- 12Pa.
Because the vacuum application department involves a wide range of working pressures, any type of vacuum pump can not be completely suitable for all working pressure ranges, and different types of vacuum pumps can only be used according to different working pressure ranges and different working requirements. In order to be convenient to use and meet the needs of various vacuum processes, various vacuum pumps are sometimes combined according to their performance requirements and applied in the form of units.
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