The need for miniaturization and integration of electronic products, such as computers, microelectronics, aerospace, large-scale integrated circuits, etc. Both of them need miniaturization and integration.
Size:
The micromechanical dimension is 0.1~10 mm.
The micromechanical dimension is 0.1~100μ m.
Minimum line width: um
small scale integrated circuit
medium scale integration
Large scale integrated circuits 3~6
VLSI 0. 1