Dimensions processed by micro-machining technology

Micro-machining is generally applied to the micro-machining of relatively precise mechanical parts and instrument parts, such as clocks, measuring instruments, medical instruments, optical instruments, micro-motors and micro-gears. Both require small size and light weight.

The need for miniaturization and integration of electronic products, such as computers, microelectronics, aerospace, large-scale integrated circuits, etc. Both of them need miniaturization and integration.

Size:

The micromechanical dimension is 0.1~10 mm.

The micromechanical dimension is 0.1~100μ m.

Minimum line width: um

small scale integrated circuit

medium scale integration

Large scale integrated circuits 3~6

VLSI 0. 1