PVD (Physical Vapor Deposition) means that under vacuum conditions, low voltage and low current arc discharge technology is used to vaporize the target, ionize the vaporized substance and gas, and deposit the vaporized substance and its reaction products on the workpiece under the acceleration of electric field.
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Development of PVD technology
In the late 1970s, PVD technology was used to prepare thin films with high hardness, low friction coefficient, wear resistance and stability. The application of high-speed steel tools in this field has attracted great attention of the world manufacturing industry, and the coating equipment with high performance and high reliability has been further studied with the appearance of cemented carbide and ceramic tools. Compared with CVD process, the treatment temperature of PVD process is 600℃ lower, which affects the bending strength of tool materials. The compressive stress under the internal stress state of the film is more suitable for the coating of cemented carbide precision and complex tools; The influence of PVD process environment accords with the development of modern green manufacturing. At present, PVD coating technology has been widely used in the coating treatment of cemented carbide end mills, drill bits, step drills, oil hole drills, reamers, taps, indexable milling inserts, special-shaped tools and welding tools.
PVD technology can only improve the bonding strength between film and tool substrate. The coating developed from the first generation of TiN to TiC, TiCN, ZrN, CrN, MoS2, TiAlN, TiAlCN, TiN-AlN, CNx, DLCTA-C and other composite coatings.
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Coating PVD technology
Enhanced magnetron cathode arc: cathode arc technology: ionize the target with low voltage and high current in vacuum to deposit thin film materials. Enhanced magnetron cathode arc uses electromagnetic field to control the arc effect on the target surface, which makes the material ionization rate higher and the film performance better.
Cathode arc filtration: cathode arc filtration (FCA) combined with high efficiency electromagnetic filtration system produces plasma macro particles, which are separated from the source and cleaned by magnetic filtration. The ionization rate of particles is 100%, and the film prepared by filtering particles is not dense, smooth, corrosion-resistant, and has strong adhesion to the car body.
Magnetron sputtering: In vacuum environment, ionized inert gas bombards the target under the action of voltage and magnetic field, so that the target is separated, original or in form, and a substrate-shaped film is deposited. According to the purpose of ionization power supply, both conductor and non-conductor materials are sputtered.
Ion beam DLC: The ion beam energy of carbon released by ion beam of hydrocarbon gas is controlled by adjusting ion beam energy and increasing ion beam voltage. Compared with the star arc coating ion beam source, the high-voltage ion beam source makes the film more closely combined with the substrate. Ionization current accelerates the deposition of DLC films. The main advantage of ionization technology is that the deposition is ultra-thin, and the process control accuracy of layer structure reaches several angstroms, which reduces the defects caused by particle pollution in the process.
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supplement
Physical vapor deposition technology * PVD introduces the characteristics of physical vapor deposition of metal evaporation.
Nowadays, PVD arc sputtering and coating deposition require high vacuum conditions.
Ionic bond cathodic arc PVD coating technology was invented by the former Soviet Union in 1970s. Nowadays, arc deposition technology is used to coat a variety of tools.
Process temperature
Typical PVD coating processing temperature is between 250℃ and 450℃. In some cases, the PVD coating temperature is lower than 70℃ or higher than 600℃ depending on the coating quality in the application field.
The coating is suitable for typical parts.
PVD is suitable for depositing coatings on many tool mould parts, including tool mould wear-resistant parts and medical device decoration products.
Materials include steel cemented carbide and electroplated plastic.
Typical coating types
The coating types are tin, altin, tialn, CrN, crcn and ticnzrn, and the composite coating includes TiALYN or w-c: h/DLC.
The coating thickness is 2~5um. In some cases, the coating is as thin as 0.5um and as thick as 15um.
The coating type and thickness determine the process chambers 3~6.
Plus engineering advantages
Suitable for coating seed materials.
Reduce working procedures and increase production.
Dimensional deformation of parts at lower coating temperature
Process environmental pollution