2. According to the working requirements, the working gas of this kind of ion source is argon, and the reaction gas can be nitrogen, oxygen, hydrocarbons and other gases.
3. The cathode filament at the upper part of the discharge area generates hot electrons after heating. When positive potential +UA is applied to the anode of the ion source, electrons move to the anode under the action of electric field. Due to the existence of magnetic field, electrons advance in spiral orbits around the magnetic field lines and collide with atoms of working gas or reaction gas to ionize them.