Microelectromechanical system is a 21st century cutting-edge technology built on the basis of micron/nanotechnology (micro/nanotechnology), which makes it possible to design, process, manufacture, and control micron/nanometer materials. It can be mechanical components, optical systems, drive components, electronic control systems, digital processing systems integrated into a whole unit of the miniature system. This microelectromechanical system is not only able to collect, process and send information or instructions, but also able to act autonomously according to the acquired information or according to external instructions. It uses microelectronics technology and micromachining technology (including silicon body micromachining, silicon surface micromachining, LIGA and wafer bonding and other technologies) combined with the manufacturing process, to create a variety of excellent performance, low cost, miniaturized sensors, actuators, drives and microsystems.
Microelectromechanical systems (MEMS) is a new multidisciplinary cross-cutting technology developed in recent years, which will revolutionize human life in the future, and involves the disciplines of mechanics, electronics, chemistry, physics, optics, biology, and materials.
Microelectromechanical systems have been used in accelerometers for automobile airbags. They replace less reliable devices at a lower cost and promise to be able to inflate based on the sensation of deceleration and also based on the size of the person being protected. Basically, a micro-electro-mechanical system device consists of microcircuits on a small silicon chip into which mechanical devices like mirrors and sensors are implanted. Potentially, such chips can be manufactured in large quantities at low cost and cost-effectively.
Micro-electro-mechanical systems that are available now or are being investigated are: Global Positioning System (GPS) sensors that can be included in express mail packages to be used for continuous tracking and sensing of packages being processed en route. Sensors implanted in wing mechanisms so that the wing is able to feel airflow and react to it, changing the wing surface drag; effectively creating many tiny ailerons. Optical switching devices, capable of switching light signals in different paths at a switching speed of two billionths of a second. Sensor-driven cooling and heating systems that dramatically improve energy efficiency Building support for embedded sensors that can alter the adaptability of materials based on atmospheric pressure sensing Saffo distinguishes between sensor-based microcomputers (which he calls "MEMS") and microdevices containing gears, mirrors, tubes, and other parts (which he calls "micromechanics"). called "micromachines").