MEMS is a technology that uses integrated circuit technology to design, process, manufacture, measure and control micro/nano materials. It is a micro-electromechanical system integrating sensors, actuators, signal processing and control circuits, interface circuits, communication and power supply.
The equipment used includes: double-sided mask aligner, plasma deep silicon etching machine, chemical etching tank, silicon wafer calibration and bonding machine, high temperature furnace, laser corrector, probe test bench, etc.