-Review of the achievements of Emei Semiconductor Materials Factory and Institute in the past 30 years of reform and opening up.
1. Stubbornly tackle key problems and build the first polysilicon production line with independent intellectual property rights in China.
Polycrystalline silicon is an important basic material of electronic information, and is known as "the cornerstone of microelectronic architecture". It is the only raw material for producing monocrystalline silicon. 1958, China began to adopt the "traditional Siemens method" to produce polysilicon. The polysilicon produced by the traditional Siemens process not only can't meet the needs of the development of electronic information industry in terms of quantity, quality, variety and price, but also has high energy consumption, high material consumption, high production cost and serious environmental pollution, which can't expand production, leading to the shrinking of polysilicon production in China and the danger of extinction. Due to the importance of semiconductor polysilicon in national economy and national defense and military industry, the state has invested a lot of manpower and financial resources to try to introduce advanced foreign polysilicon production technology, but it has failed. In this case, E-Semifactory and Institute conducted research experiments on polysilicon technology from 65438 to 0987. After 10 years' efforts, the four core technologies in the "improved Siemens method" for polysilicon production were finally overcome, and the first polysilicon production line with independent intellectual property rights with an annual output of 100 tons was built100 months ahead of schedule, which was put into full operation at the end of the same year and passed on to100 tons in 2000. Experts agree that the production line, from technology to equipment, from design to operation, is a systematic project independently completed by China scientific and technological personnel. In the process of implementation, the majority of scientific and technological personnel worked hard to tackle key problems and were brave in innovation, and solved 15 key technologies. Its success indicates that China has basically mastered the world's advanced polysilicon production technology-improved Siemens method, and has the independent technology and ability to design, construct and manage larger-scale polysilicon production. This production line won the "High-tech Industrialization Demonstration Project Award" issued by the State Planning Commission in 200 1, and won the special prize for scientific and technological progress in Sichuan Province in May of the same year.
After 200 1 year, EBA factory successfully applied for the project of "1000 tons/year polysilicon high-tech industrialization demonstration project", and mastered and implemented the core technology of improved Siemens method.
Second, technical transformation and expansion of production, continuous improvement of product grades and continuous expansion of output.
The polysilicon reduction furnace was successfully expanded from 3 pairs of rods at the initial stage of production to 6 pairs of rods and 9 pairs of rods until 18 pairs of rods. In 2004-2005, E-Half Factory completed the "technical transformation project of solar polysilicon production line with an annual output of 200 tons", which increased the production capacity to 200 tons/year. A large-scale energy-saving and efficient reduction furnace with 18 pairs of rods has been successfully developed by ourselves, and the output of a single furnace can reach more than 1 ton. The long-term continuous operation is very good, which makes our factory and research institute steadily climb to a new level in the design, manufacturing and application technology of large reduction furnaces.
Before monocrystalline silicon 1995, the size of Czochralski monocrystalline silicon products were all below φ 3 inches, so the market competitiveness was not strong. Since 1996, we have purchased 10 domestic 62-type Czochralski furnaces, 3 80-type Czochralski furnaces and 3 large-scale furnaces (self-made appliances), which not only expanded the production capacity, but also increased the size of mainstream products from φ 3 inches to 4-6 inches through technological innovation, and improved the competitiveness of products. Φ 8-inch Czochralski single crystal silicon has been successfully pulled in E-Semifactory and Research Institute. Zone-melting monocrystalline silicon has overcome the dielectric irradiation doping and gas phase doping technology, greatly improved the uneven cross-section and met the needs of military products. Our company has also established a φ 4-6 inch cutting, grinding and polishing production line matching with the production of monocrystalline silicon, which has improved the technical content and added value of the products. Since 1996, our Czochralski products have entered the American market, and since 1998, silicon polishing products have opened the Hong Kong market. We have also developed more than 30 high-tech new products and put them on the market, among which 10 new products have filled the gaps in China. The zone-melting high-resistance silicon single crystal developed by Hubei Institute (Factory) has won more than 20 provincial and ministerial awards, of which 6 are cutting-edge scientific and technological achievements in China.
High-purity materials E-Semifactory's high-purity materials include 24 elements, more than 50 varieties and more than 280 specifications. The purity is 5-7 "n" (99.999% ~ 99.99999%), and some elements reach 8 "n" (99.99999%). The variety is the first in the country, and the purity is the first in the country. After technical transformation and expansion, the production capacity of high-purity antimony, arsenic, tin, indium, tellurium, cadmium, phosphorus and other varieties has been greatly improved. Among them, the production capacity of high-purity antimony has increased by 20 times, from 500 kg per year to 12 tons, and the production capacity of high-purity arsenic has also increased by 4-5 times, realizing industrialization. Hubei Plate Factory and Research Institute have become the largest production and research base of high-purity metals in China, with a domestic market share of 80% and the ability to export in large quantities. At the same time, EBA Factory hAs cooperated with the Ministry of Information Industry and relevant institutes of ordnance industry successively, and provided high-quality and high-purity materials such as Ga, In, As, Sb, te and Cd in a number of military key tasks and projects, which have been awarded many times by the State Council, the Central Military Commission and the Science and Technology Commission.
Production, operation and output of main products By the end of 2007, the production, operation and output ratio of main products in Hubei Plate Plant 1978 had increased several times. For example, the total industrial output value in 1978 was100000 yuan, and in 2007 it was 342.7 million yuan. The output changes of main products in recent 30 years are shown in the following table.
Main products 78 years (output: tons) 2007 (output: tons)
Polysilicon 6 155
Monocrystalline silicon 2 132
Silicon wafer processing 0. 178 47
High purity metal 2 (capacity) 65 (capacity)
Three, bigger and stronger, all work go hand in hand, remarkable achievements.
Our company takes the development of semiconductor material industry in China as its own responsibility, and has been committed to the research and development of new products, new processes and new technologies. * * * More than 300 major scientific research achievements have been made, and more than 6,000 new product trial-production agreements have been completed, which have provided much-needed high-quality semiconductor materials for China's national defense industry and national key projects such as intercontinental missiles, underwater launch vehicles, experimental communication satellites, Beijing Electron Positron Collider and Shenzhou VI spacecraft, and won many awards. Especially since the reform and opening up, remarkable achievements have been made in scientific research, quality, safety and environmental protection. From 1984 to 2005, E-Semifactory won 87 scientific research achievement awards in polysilicon, monocrystalline silicon and high-purity metals, including 23 provincial and ministerial second prizes and 36 third and fourth prizes. Other awards are as follows:
-1990 silicon single crystal grinding wafer won the national silver award for high-quality products;
-65438+1June 5, 1992 was awarded the title of National Advanced Enterprise in Environmental Protection by the State Environmental Protection Bureau;
—— In 2000, our factory and products passed the national quality system certification;
—— On May 23rd, 2000, E-Half Factory won the provincial special prize for scientific and technological progress;
-20011high purity metal for semiconductor won the gold medal in the International (Tianjin) Invention Patent and New Technology and New Products Expo;
—— From June 5438 to/kloc-0 to October 28, 2003, Hubei Board Factory was awarded the title of "Sichuan High-tech Enterprise" by the Science and Technology Department of Sichuan Province;
—— In 2006, it was awarded the title of advanced unit of national defense science, technology and industry cooperation by the people of China and the Commission of Science, Technology and Industry for National Defense;
—— In July, 2008, it was named as the crystal material processing (application) supporting unit of the international advanced technology research and application center of science and technology industry by the International Science and Technology Commission.
Four, strong alliance, take the road of large-scale industrial cluster development
On February 26th, 20001year, Mei Jia High Purity Materials Co., Ltd., a joint venture of American Crystal Technology Corporation (AXT), was officially listed. The two sides invested 28.8 million yuan (75% of our company and 25% of the US) to build a production line with an annual output of 20 tons. The project was put into production in 2002, and the American AXT Company underwrites 75% of the products, with an annual sales income of 30 million yuan and a profit and tax ratio of100000 yuan. The successful cooperation of this project is the first step taken by our factory and our institute towards the goal of producing large-scale industrial clusters of high-purity metal materials.
On June 28th, 2006, Dong Qi and Yibang signed a cooperation agreement in Chengdu to jointly build a photovoltaic industry chain.
● The 3×1500t polysilicon project with a total investment of 3 billion yuan was successfully promoted in Leshan wutongqiao district. In February 2007, the first 65,438+0,500-ton civil engineering started in an all-round way, and the construction proceeded as planned. Now it has entered the stage of equipment installation and is expected to be put into production in February 2007. Phase II1500t project is expected to be completed and put into operation in September 2009, and phase III1500t project will start in 2009.
● From June 13 to June 15, 2007, the "2007 Third China Symposium on Solar Silicon Materials and Solar Cells" was successfully held in Emei Mountain Hotel. More than 600 experts, scholars and dealers from home and abroad gathered at the foot of Mount Emei to discuss the development and utilization of renewable energy.
● The leading group of E-Half Factory won the title of "Advanced Collective of Four Excellent Leading Groups Created by State-owned Enterprises in the Province in 2007".
● Successfully passed the audit of Sichuan Three Gorges Certification Company in 2007. In August of that year, we obtained the certification of ISO900 1:2000: 2000 quality standard, ISO 14004:2004: 2004 environmental standard and GB/T 2800 1-200 1 occupational health and safety standard. And was awarded the honorary title of "Quality Month" in 2007 by Sichuan Bureau of Quality and Technical Supervision.
● On April 29th, 2008, the first phase of the 240 MW photovoltaic project with a total investment of 2.5 billion yuan was held in Wenfu River, Emei Mountain. The first phase project 120MW is progressing smoothly, and it is expected to be completed and put into operation in the first half of 2009.
The monocrystalline silicon factory has been engaged in the research and production of monocrystalline silicon for more than 40 years. After years of development, Emei Semiconductor Material Factory is independent.
The production capacity of crystalline silicon is constantly expanding. The production capacity of Czochralski crystal reaches 65,438 0.20 tons/year, including 65,438 0.00 tons/year for solar-grade products, 65,438 0.5 tons/year for IC-grade single crystals, 5 tons/year for transistor-grade products, 30 tons/year for zone-melting single crystals, and the maximum diameter is Ф 5. Among them, NTDFZ single crystal products occupy a large share in the domestic market and are the fist products of our factory. We are also the only enterprise in China that can provide vacuum zone melting ultra-high resistance monocrystalline silicon, and our products are widely used in the production of special devices.
Single crystal silicon factory is a subordinate unit specializing in the research and production of Czochralski and zone melting single crystals, with a large number of professional technicians and high-level crystal pulling technicians. We have world-advanced silicon single crystal manufacturing equipment such as F Z-30 furnace, C G6000 and T D R80, and a strong equipment management team. Domestic smelting furnace has been well applied in our factory, which is inseparable from the level of electrical appliance transformation.
The polysilicon factory has been engaged in the research and production of polysilicon for more than 30 years. After long-term technical research and improvement of production system, Siemens technology has been solved and four core technologies in "Siemens method improvement" have been overcome. Have independent intellectual property rights. With the completion and perfection of the "National Key Industrial Experimental Line with an annual output of100t polysilicon", the polysilicon production capacity has reached100t/year, and the product quality has been continuously improved. The technical quality index of the product meets the requirements of circuit-level, transistor-level, solar-level Czochralski single crystal and zone-melting single crystal. At the same time, it also ended our history of not exporting polysilicon. In addition to meeting our own needs, our products are also sold all over the world and have been well received by customers. In 2006, China's first polysilicon production line with an annual output of 200 tons was completed, which made China's polysilicon production technology enter the world's advanced ranks. It has the largest output and best quality polysilicon production line with independent intellectual property rights in China, 80% polysilicon experts in China and first-class professional technical teams in process research, manufacturing and equipment maintenance.
There are more than 300 employees and more than 60 engineers and technicians.
The production and processing of monocrystalline silicon wafers have a history of more than 20 years. Among them, N < 100 > and P < 1 1 > IC-grade polishing sheets won the national silver award. After the investment, they now have the ability to polish 300,000 wafers, siliconize 600,000 rotten wafers and grind 2.8 million silicon wafers every year. It has many world-advanced high-precision machining equipments, such as D S26 1 265 multi-wire cutting machine, T S-23 internal cutting machine, W-S-4000 chamfering machine, SPEODFOM grinder and polisher, etc. The maximum machining diameter is Ф 6, and the thinnest grinding piece is 200 microns, which can provide high-quality monocrystalline silicon wafers for integrated circuit manufacturing and separation device manufacturing.
Established in 1964, Dong Qi Emei Semiconductor Material Factory's High-purity Division (formerly High-purity Metal and Compound Material Branch) is the first high-purity metal material factory with the most complete technology and variety in China, and the only analytical testing center and high-purity metal material research unit with complete environmental protection facilities in China.