All technologies are created and developed out of the needs of production, and cleanroom technology is no exception. During the Second World War, the United States produced aircraft navigation with airborne gyroscope, due to unstable quality, every 10 gyroscopes to rework an average of 120 times. 50 years during the war on the Korean Peninsula in the early 1950s, the United States of America's 160,000 electronic communications equipment, the replacement of more than a million electronic components, radar failure time accounted for 84% of the time, submarine sonar failure time accounted for 48% of the time. The reason is that the poor reliability of electronic devices and components, the quality is not stable. The military and manufacturers to investigate its causes, and finally from various aspects of the production environment is not clean related to the judgment. Although at the time had spared no expense, to take a variety of strict measures to close the production plant, but with little success. Until the early 50's, the U.S. Atomic Energy Commission to solve the problem of harmful radioactive dust capture, in 1951 developed a successful high-efficiency air filter (HEPA-High Efficiency Particulate AirFilter) applied to the production of air supply filtration, the real birth of a The modern significance of the clean room.
In 1961, the U.S. Sandia National Laboratories (Sandia National Laboratories) senior researcher Whitefield (Willis Whitfield) put forward at the time called laminar flow (laminar flow), is now called unidirectional flow (unidirectional flow) The clean air flow organization scheme, and applied to the actual project. Since then, the clean room has reached a higher level of cleanliness than ever before.
In the same year, the U.S. Air Force developed and issued the world's first clean room standard TO-00-25 - 203 Air Force Directive "Clean Room and Clean Bench Design and Operation Characteristics Standards ". On this basis, in December 1963 announced the clean room is divided into three levels
The U.S. Federal Standard FED-STD-209. this formed the prototype of the perfect clean room technology. These three key advances are often referred to as the three milestones in the history of modern cleanroom development.
In the mid-1962s, cleanrooms were springing up in the United States in a variety of industrial sectors. It is not only used in the military industry, but also in the electronics, optics, miniature bearings, micro-motors, photographic film, ultra-pure chemical reagents and other industrial sectors have been promoted to the time of the scientific
Technology and industrial development has played a great role in promoting.
The early seventies clean room construction focus began to shift to medical, pharmaceutical, food and biochemical industries. In addition to the United States and other industrialized countries, Japan, Germany, Britain, France, Switzerland, the former Soviet Union, the Netherlands, etc. also attach great importance to and have vigorously developed clean technology.
The early sixties was the beginning of the development of clean technology in China, roughly ten years later than abroad. In China, it was a very special and difficult time, on the one hand, just after three years of natural disasters, the economic foundation was weak, on the other hand, there was no direct communication with the world's advanced countries in science and technology, so we could not get the necessary scientific and technological data, information and samples. Under such difficult conditions, around the needs of precision machinery, aviation instrumentation and electronics industry, China's clean technology workers began their own entrepreneurial journey.
The development of clean technology in China is divided into the following stages:
Starting and foundation stage
The early 1960s to the end of the 1970s, this decade or so is the starting and foundation stage of China's clean technology.
In 1965, high-efficiency air filters with corrugated partitions developed by the Air Conditioning Research Institute of the China Academy of Building Research and Bengbu Insulation Material Factory passed the appraisal, marking the official start of China's clean technology. At that time, there were two types of filter paper used, one was GS series of high efficiency air filters with bluestone
cotton fiber filter paper, which was soon eliminated due to the adverse effects of the production process on human health, and the other was GB series of high efficiency air filters with ultra-fine glass fiber paper, which has been in use until now. After many comparative tests of domestic and foreign similar products, as well as the results of the tests conducted by the Aerosol Research Institute of the University of Minnesota on the Chinese high-efficiency filter paper, it has been proved that the main technical indexes of the domestic high-efficiency air filters have reached the same period of time as the international standards.
It is worth mentioning that, although Japan since the late 1950s has begun to cooperate with the United States in Japan to manufacture high-efficiency air filters, clean technology started earlier, but the technology and filter paper from the United States, until 1969, Japan's HEPA filters only complete the nationalization.
At the same time, successively in 1963, the successful development of the filter media sodium flame test bed, built in 1964, a high-efficiency filter sodium flame test bed, which is the normal production of high-efficiency air filters and quality to improve the role of ensuring. Chinese Academy of Medical Sciences, Institute of Health, Tsinghua University Nuclear Energy Institute and other units, which has paid hard work.
If the HEPA filter is compared to the "heart" of clean technology, then the testing technology and instrumentation is the eye of clean technology, which is relied on to identify and check. In the mid-sixties, the Chinese Academy of Medical Sciences Health Research Institute, Harbin Institute of Construction Engineering,
Dandong Instrumentation Research Institute, Chinese Academy of Sciences, Anhui Institute of Optical Machines, air conditioning and other units of the Institute has invested in the development of light-scattering particle counters. 1973, three years to build the Institute successfully developed China's first model for the J-73 type of particle counters, and calibration of particle counters with the particle counters, as well as the particle counter. As well as the standard particles used for calibrating the particle counter - monodisperse polystyrene latex standard particles (PSL), the average particle size from 0.177~1.460μm,*** nine kinds, the standard deviation is very small, the root-mean-square difference coefficient of variation σ / χ & lt; 5%.J-73*** There are 15 particle size files, the measurement range is 0.3~10μm, the sampling flow rate is 300ml/min. These two achievements passed the national appraisal in 1974 and were considered to have reached or close to the world level at that time. The popularization and application of the dust particle counter has promoted the scientific research, design and production of purification equipments of China's clean technology, and progressed along the road of self-reliance and self-improvement.
At the same time, some design institutes related to electronic technology, precision machinery and national defense industry were also exploring and researching the engineering design of clean room. 119 Shenyang factory and 13 Shijiazhuang factory built in 1965 were designed and constructed by the Fourth Institute of the Third Ministry of Machine Tools (now the Fourth Design Institute of the Ministry of Aeronautics Industry) and the Second Design Institute of the Fourth Ministry of Machine Tools (now the China Electronic Engineering Design Institute) with reference to the former Soviet Union's make-up level, respectively.
The Design Institute of the Chinese Academy of Sciences (CAS) selected the domestic GB series of high-efficiency air filters in 1966 to design the precision machinery assembly workshop of CAS with an area of 760 square meters, and put it into production in 1970. It was later determined that under static conditions, when the number of indoor air changes was 20AC/h, the indoor cleanliness reached the 10,000 level of the then U.S. Federal Standard 209A.
Early 1973, the Ministry of the Tenth Design Institute and the Eleventh Design Institute, respectively, embarked on the design of the clean room of the 878 plant and the 4433 plant, the two factories of the clean room level from the FED-STD-209A class 100,000 to class 100, the use of airflow
Types of vertical unidirectional flow, the airflow is a vertical unidirectional flow. p>Types include vertical unidirectional, horizontal unidirectional and turbulent flow.
In this stage, with the clean room supporting the success of the trial production of purification equipment one after another, some of the original production of radio, semiconductor special equipment, the production of medical equipment factories to the production of purification equipment, the formation of a preliminary production scale and layout of the clean room equipment in the country. These factories were mainly located in Beijing, Tianjin, Suzhou, Shanghai and Chongqing. From the design and manufacture of a variety of types of clean bench (clean bench) to start, followed by the design and manufacture of the blowing room, airlock room, material transfer window, residual pressure valve and other related equipment.
In order to adapt to the late sixties, the early seventies, some research institutions on the demand for small-scale clean working environment, as well as some of the old plant for small-scale clean room renovation needs, air-conditioning Institute of the Construction and Research Institute, the Sixth Ministry of Nine (now the Ninth Design Institute of the State Shipbuilding Corporation),
Three Ministry of the Fourth Institute of Medical Instruments in Tianjin, Tianjin Medical Instrumentation Factory, Tianjin Pharmaceutical Purification Plant predecessor), etc., developed a successful assembly of vertical one-way clean bench (clean bench). Developed a successful assembly of vertical unidirectional flow, horizontal unidirectional flow clean room. This assembly clean room produced by the purification equipment factory, especially in the use of the original building for technological transformation,
The need for purification of the area is relatively small occasions, play the design, construction and fast, stable technical performance characteristics, in 1974 in Tianjin through the national appraisal.
Since 1974, the Construction Research Institute of air conditioning, the Ministry of four machines ten hospitals and other units were established clean technology laboratory, carried out some basic research. For example, the Air Conditioning Institute of CIRC has carried out research on the calculation of uniform and uneven distribution in the laboratory of the clean room of turbulence, and the research on the characteristics of the airflow in the clean room of full-ceiling air supply and return air on both sides; the Tenth Design and Research Institute of the Ministry of Four Machines has carried out the experimental research on the clean room of turbulence, and the research on the airflow distribution of the high-efficiency filter air supply outlet, and the research on the amount of human body dust
. The research of airflow distribution of high-efficiency filter air supply outlet, the amount of dust generated by human body and many other topics.
At the same time, some research units and design institutes, such as the Seventh Academy of the Ministry of Machinery (the Seventh Academy of the Ministry of Aerospace Industry), the Air Conditioning Institute of the Construction Research Institute, the Tenth Academy of the Ministry of the Fourth Machine, the Eleventh Academy of the Ministry of Machinery, the Second Academy of the Ministry of the Second Machine (the Second Academy of the Ministry of Nuclear Industry), the Ninth Academy of the Ministry of the Sixth Machine, etc., and some colleges and universities, such as Tianjin University, Tongji University and the Hebei Institute of Technology, have formed the Clean Room Technology Research Collaborative Group to cooperate with the national large-scale integrated circuits to In order to standardize and improve the level of clean technology in China, a series of tests and researches have been carried out. Such as in Beijing, Xi'an, Shanghai and other places in different environments outdoor atmospheric dust concentration of long-term clinical testing and statistical analysis, in all parts of the country on the clean room has been built to test, and began to clean room design, construction, operation and production of equipment to summarize the experience.
The development of clean technology in foreign countries in the same period is as follows:
In the sixties, the United States of America's electronics, precision machinery and other factories such as the clean room sprung up at the time of science and technology and industrial development played a great role in promoting the industrial clean room technology (ICR-Industrial), and at the same time, began the industrial clean room technology (ICR-Industrial). At the same time, the process of transplanting industrial cleanroom technology (ICR-Industrial Cleanroom) to biological cleanroom (BCR-Biological Cleanroom) began. In the early seventies, the cleanroom construction boom shifted to the medical, pharmaceutical, food and biochemical industries.
In 1966, the world's first vertical unidirectional flow of biological clean technology room (BCOR-Biological Clean Operating Room) was built in New Mexico, USA. In the same year, the then American Association of Contamination Control AACC (American Association ofContamination Control, later merged into IEST-Institute of Environmental Science and Technology), published In the same year, the then American Association ofContamination Control (AACC), later merged into the IEST-Institute of Environmental Science and Technology, published guiding documents such as "Design and Construction of Laminar Flow Operating Rooms" and "Laminar Flow of Clean Air in Surgical Applications".
In the same year, the world's first horizontal laminar flow sterile room was built at the University of Minnesota in the U.S.A. In 1967, the world's first bioclean leukemia room was built at the M.D. Anderson Hospital in Texas.
In the United Kingdom, the famous plastic surgeon D.J. Charnley, also built in 1966, called the clean house (clean house) type of bioclean operating room. 1969 in Ritz, Austria, the first laminar flow wards were built in Europe,
then in Switzerland, Germany has been built in the medical bio-clean room.
The first European laminar flow ward was built in 1969 in Ritz, Austria.
The development was faster in Japan, where a bioclean room (BCR) with high-efficiency filters was built at the National Institute of Public Health in 1965 for use as a feed room for sterile animals (SPF), and an assembly-type vertical laminar-flow leukemia room was built at the Aichi Prefectural Staff Hospital in 1970.
In 1972, a vertical laminar flow type sterile operating room was built at the National Osaka Hospital. By the end of 1977, the number of bioclean rooms in hospitals had reached 131.
To ensure the safety and efficacy of medicines, the U.S. Food and Drug Administration (FDA) began to implement the "Good Manufacturing Practice" (GMP) in the U.S. in 1964, and the World Health Organization (WH0) promulgated the "Good Manufacturing Practice" in 1969. The World Health Organization (WH0) promulgated GMP, which stipulates the requirements for the production environment and water quality to ensure the aseptic production of pharmaceuticals. Biological clean room technology has been widely used in the pharmaceutical industry in the United States, Japan, Western Europe and other industrialized countries.
The U.S. FDA promulgated the "Food Manufacturing Standard" in 1969, which is the GMP for food products, requiring strict control of microorganisms and temperature and humidity during the manufacturing and packaging process to prevent food spoilage. Clean rooms for aseptic canning of food products were rapidly promoted in Europe and the United States at that time.
The United States, for example, in 1971 the total amount of aseptically canned food for 2.54 billion tons in 1980 grew to 13.27 billion tons, of which the growth of meat products nearly 19 times. In the food brewing, fermentation industry on the cultivation of pure seed, inoculation, seed expansion and other processes are also used clean room technology.
To occupy about 70% of the clean room market for the electronics and semiconductor industry, the seventies is known as the era of large-scale integrated circuits (LSI), and the eighties is known as the era of very large-scale integrated circuits (VLSI). The degree of integration of integrated circuits from 1970, almost every 2 ~ 3 years to grow four times the rate of rapid development.
The late seventies, 64K-bit RAM as the stage of ultra-large-scale integrated circuits into the development of landmark products, noting that its typical line width of 3μm, need to control the smallest particle size of 0.3 ~ 0.8μm. That is to say, the efficiency of 0.3μm as the standard HEPA filter can not adapt to the further development of electronic technology. The United States, Japan have developed and manufactured the 0.1μm dust particle counting filtration efficiency of 99.99 ~ 99.995% of the ultra-high-efficiency air filters - ULPA (Ultra low penetration air) filters (also translated as "very low penetration rate of air filters"). ULPA (Ultra low penetration air) filters (also known as "extremely low penetration air filters").
Maturity and development stage
The end of the seventies to the end of the eighties, this decade, China's clean technology has experienced a sunny stage of development. In the course of the development of China's clean technology, many important landmark achievements were almost all born in this stage.
1, standards, norms and international exchanges:
January 1979 published to build the Institute of Air Conditioning, led by the Institute of design, research and universities and colleges and other units of the completed industrial clean room testing and summarize the experience of the preparation of the "air clean technology measures", played a normative and It played an important role in promoting China's clean room technology at that time, and laid the foundation for the formulation of national standards in the future.
In December 1984, the Tenth Design Institute of the Ministry of Electronics, together with the relevant units *** with the compilation of the national standard GBJ73-84 "clean plant design specifications", which, on the cleanliness grading standards equivalent to the United States Federal Standard 209B, which was recognized by the majority of countries in the international community, and abandoned the previous Chinese domestic standards that had been different in different areas. The clean room grading standard adopted by the US Federal Standard 209B, which was recognized by most of the international countries at that time, discarded many clean room grading standards which had been used in different scopes in China, and made a step forward for China's clean room technology to be in line with the international standard.
Subsequently, combined with China's national conditions, reference to international standards have been formulated GB6166-85 high-efficiency filter media performance test methods, penetration rate and resistance, GB6167-85 dust particle counter performance test methods, GB6168-85 laminar flow clean bench inspection standards, and other standards, the unification and standardization of test, measurement methods, and enhance the scientific nature of the role of the great.
It is worth mentioning that in November 1988, the final draft of the national standard GB12218-89 "general ventilation air filter performance test methods" in the provisions of the atmospheric dust limit counting efficiency method to determine the coarse, medium and high efficiency air filters, which is represented by Tianjin University of the domestic research units for many years. In 1993, the European Ventilation Association (ASHRAE) successively abandoned the original atmospheric dust colorimetric efficiency method (NBS, AFI, ASHRAE) of the counting efficiency method, and at the same time promulgated the use of atmospheric dust or standard dust counting method.
Particularly in June 1982, the establishment of the Clean Technology Branch of the Chinese Institute of Electronics (the external name is "China Contamination Control Society" CCCS-Chinese Contamination Control Society), and founded the "Clean Technology". "Clean Technology" magazine (now known as "Clean & Air-conditioning Technology" - Contamination Control & Air-conditioning In 1986, China Clean Technology Society became a member of ICCCS (International Confederation of Contamination Control Society). International Confederation of Contamination Control Society (ICCCS). At that time, the member states were only the United States (IEST), Britain (SEE), France (ASPES), Germany (DIN/VDI), Japan (JACA), Italy (ASCCA), Switzerland (SRRT) and the four Nordic countries (R3-Nodic). (The number of member countries has increased to 18, including Australia-ACCS, Russia-ASEMCO, Belgium-BCW, Korea-KACA, Romania-RACC, Brazil-SBCC, the Netherlands-VCCW, and the United Kingdom-SBCC. SBCC, Netherlands-VCCN, Scotland-SZCZ).
In the 9th ICCCS Los Angeles Conference in 1998 and the 10th ICCCS Zurich Conference in 1990, the author, on behalf of China, was invited to be the Executive Chairman of the Conference.
2, biological clean room technology:
Biological clean room technology in China started more than ten years later than abroad. At the end of the seventies, some pharmaceutical factories remodeled their original air-conditioning systems and began to use high-efficiency air filters as the end of the air-conditioning air supply system in place of the original filters or glycerin gauze covers and so on. Shanghai Pharmaceutical Industry Design Institute, Harbin Institute of Construction and related pharmaceutical factories and other units in this period has been in Shanghai, the fourth and seventh pharmaceutical plant, Zhenjiang Pharmaceutical Plant adopted the biological clean room technology.
In 1982, the China Pharmaceutical Industry Corporation based on national conditions and foreign experience to develop a "pharmaceutical production management specification" (trial draft), in which the air cleanliness level reference to the U.S. Federal Standard 209A, will be divided into the production environment is greater than 100,000 level and 100,000 level of control areas and 10, 000 level and local 100 level of cleanliness. Class 100,000 and Class 100,000 control area and Class 10,000 and localized Class 100 clean area. By the end of 1985, the "Guidelines for the Implementation of the Good Manufacturing Practice" were compiled and formally promulgated together with the partially revised "Good Manufacturing Practice", laying the foundation for the modernization of the pharmaceutical industry. 1988, the Ministry of Health issued the "Good Manufacturing Practice", which is the most comprehensive and comprehensive set of Good Manufacturing Practice. In 1988, the Ministry of Health issued the "Good Manufacturing Practice", the spirit of which is consistent with the aforementioned norms, and prepared the conditions for the implementation of GMP certification in the pharmaceutical industry.
In this stage of the biological clean room in the medical aspects of the successive popularization and application. 1980 by the Harbin Institute of Construction Engineering and Jixi no special *** with the development of simple horizontal laminar flow air-conditioning and purification unit for the Heilongjiang Hospital; by the Ministry of the Sixth Engineer Nine hospitals in cooperation with the Shanghai Jinshan Electronic Equipment Factory to complete the assembly of aseptic sickroom for the Shanghai Xinhua Hospital cellular research laboratories, the Suzhou Medical College.
In the mid-eighties, the General Logistics Department Design Institute, Tianjin University, etc. designed and built a variety of airflow type, equivalent to the NASA standard NASA-5340 Ⅱ hundred to ten thousand levels of more than a dozen civil aseptic operating room of the 301 Hospital Rehabilitation Center operating room building. Tianjin University, Tianjin purification equipment factory designed and built the Chinese Academy of Medical Sciences blood research institute of more than one hundred levels of assembly type sterile sick room.
Early 1980s, the Academy of Military Medical Sciences, air-conditioning Institute of Construction Research, Bengbu Purification Equipment Factory and other units developed and completed the Ⅱ - A (equivalent to P3 level) biological safety cabinet (Biohazard work station) development; Harbin Institute of Construction and Engineering and other units
completed the Songjiang Cannery, sweet torch milk, tomato sauce, and bacon in the aseptic canning room, the pioneering biosafety and food processing, and food processing. pioneered the application of biosafety and food processing biotechnology in China.
Before and after 1985, the JWL pinhole-type bacterial sampler developed by the Military Medical Research Institute and the SS slit-type airborne bacterial sampler developed by the Shanghai Neo Electronic Equipment Factory in cooperation with Tongji University passed the appraisal, which provided the means for some
research work on biological clean room technology.
3, basic and technical research:
In the late seventies to the end of the eighties of the decade, in the clean room of the basic and technical research has also made numerous achievements, such as:
Proposed China's atmospheric dust statistical law, the role of humidity on the concentration of atmospheric dust, "W" type Atmospheric dust concentration daily distribution model, which provides a basis for determining the outdoor design concentration;
Proposed the isolation effect of laminar flow hoods with air curtains, design principles and calculation methods;
Proposed the theoretical formula for uniform distribution of turbulent flow clean room, empirical formula, and self-purification time, contamination time of the formula;
Proposed the maximum room width and calculation model of the unidirectional flow clean room with a lower-side return air mode.
The maximum room width of one-way flow clean room, calculation model, and the concept and data of the lower limit wind speed;
Proposed the principle and scheme of double-ring sealing combined with the sealing and guiding of high-efficiency air filters, and the sealing scheme of the inverted liquid tank;
Tested and analyzed the amount of human body bacteria;
Established the bacterial filtration efficiency test bench for the filter material and filter, and got the correlation of the filtering efficiency of the atmospheric dust and bacteria source and the counting and weighing efficiency. counting and weighing efficiency correlation.
Chinese Academy of Building Research, four machine department ten hospitals, eleven hospitals and other research institutes, design institutes, Tianjin University, Tsinghua University, Tongji University, Harbin Institute of Architecture and Engineering, Hebei Institute of Technology and other institutions have done more work on this.
4, in the product development and development:
1979 to 1981, Tianjin University, Tianjin Meilun Fiber Factory and other units through a variety of materials (polyester, polypropylene, polyvinyl chloride, cotton, wool, ultrafine fiberglass ......), a variety of processes needle punching, glue spraying, hot-melt, melt spraying, hot pressing, Rolla). Hundreds of varieties and specifications of filter media series research, screening and design and finalization of the TL-Z, TL-C series of non-woven filter media with wire diameter gradient, density gradient and material, process composite, partially replacing the United States, France, Japan and other countries at the time of the introduction of the coarse to high-efficiency filtration materials for the country to save a large amount of foreign exchange.
In 1981, the Eleventh Academy of the Fourth Ministry of Machinery, Hebei Institute of Technology and Tianjin Second Radio Special Equipment Factory successfully developed the WGP-01 mini pleat HEPA filter, which filled the gaps in the domestic products.
In 1985, the Eleventh Academy of the Ministry of Four Machines, the Sichuan Paper Industry Research Institute, and the Chongqing Radio Special Equipment Factory*** completed the development of CGB-type high-efficiency air filters, which had a counting efficiency of 99.99-99.995% for 0.1μm dust particles, and a resistance of 245-270Pa, and were appraised to have achieved the main technical indicators of the same type of ULPA high-efficiency air filters produced in Japan at that time. In January 1987, the 0.1μm class 10 clean room developed by Tianjin Pharmaceutical Purification Equipment Factory and the Air Conditioning Institute of the Construction Research Institute using foreign ULPA filters (products of Japan Shinobu Co., Ltd.) passed the appraisal, and the 0.1μm class 10 clean room developed by the Eleventh Design Institute of the Ministry of Mechanical and Electrical Engineering and Chongqing Radio Special Equipment Factory using domestic 0.1μm high-efficiency air filters passed the appraisal in May 1988, while the 0.1μm high-efficiency air filter of the Chongqing Radio Special Equipment Factory using domestic 0.1μm high-efficiency air filters passed the appraisal. In May 1988, the 11th Design Institute of the Ministry of Mechanical and Electrical Engineering and Chongqing Radio Special Equipment Factory adopted domestic 0.1μm high-efficiency air filters and the 0.1μm class 10 clean room passed the appraisal.
During the same period, the clean room technology in foreign countries continued to develop and progress steadily.
In 1982, there are about 5~60,000 devices on each chip 16K-bit random memory (RAM) has become a best-seller. 1984 256K-bit RAM has entered the practical stage. At the beginning of the same year, Japan announced that each chip set up about 2 million devices of a megabit DRAM (Dynamic Random Access Memory - Dynamic Random Access Memory) trial success. 1985, the United States completed the development of 4 megabits of integrated circuits. By the end of the 1980s, 4M-bit DRAM had been commercialized.
A variety of reduced energy consumption, with process automation and high cleanliness requirements of the clean room airflow organization and technology at this stage also came into being, such as tunnel type cleanroom (tunnel type cleanroom), clean duct (duct type cleanroom) and SMIF (standard mechanical interface-standard mechanical interface). interface-standard mechanical interface) technology.
From the mid-eighties, in order to the microelectronics industry, issued on April 24, 1976, the U.S. Federal Standard 209B issued by the highest level of cleanliness - Class 100 (≥ 0.5 μm, ≯ 100pc./cu.ft) has been unable to meet the needs of the 1M-bit DRAM line width is only 1 μm, the requirements of environmental protection. level 10 (0.5μm). In fact, from the end of the seventies, with the development of microelectronics technology, a higher level of clean room. In fact, from the late seventies, with the development of microelectronics technology, more advanced cleanrooms have been built in the United States and Japan, and the corresponding detection instruments - laser particle counter, condensation nucleus counter (CNC) - also came into being. Summarize the experience of this period and adapt to the needs of technological progress, so the U.S. Federal Standard 209C was issued on October 27, 1987, the cleanliness level from the original 100 to 100,000 four levels to expand to 1 to 100,000 six levels, and will identify the level of boundaries of the particle size from 0.5 μm ~ 5 μm to 0.1 μm ~ 5 μm expansion.
Internationally aligned towards standardization
With the International convergence towards standardization
The early nineties to the present, in the electronic technology continues to rapid development of the promotion of clean technology continues to move forward, the following table gives the international process of large-scale integrated circuits and the development of the domestic representative of the product process.
The U.S. Federal Standard FED-STD-209E, promulgated on September 11, 1992, further replaced the FED-STD-209D promulgated on June 15, 1988, and changed the cleanliness level from imperial to metric. FED-STD-209E is divided into seven classes from M1 to M7. Compared with 209D, the highest level was extended upward by half a level (≥0.5μm dust particles in air ≯ 35.3pc./m3 for level 1 of 209D, and ≥0.5μm dust particles ≯ 10pc./m3 for level M1 of 209E).
For more than 30 years, the U.S. Federal Standard 209 has been a recognized standard in the clean technology industry around the world. U.S. General Services Administration (GSA - U.S. General Services Administration), that is, the approval of the U.S. federal standards for the federal government agencies to use the authority of the unit, issued a notice on November 29, 2001, the repeal of FED-STD -209E and adopted ISO-14644 as the equivalent standard. This decision marks the clean technology
With the integration of the world economy further to the international commonwealth.
Since the early nineties, China's economy has been maintaining a stable and rapid growth, international investment continues to inject, a number of multinational groups have built a large number of microelectronics factories in China. Therefore, the domestic technical and research personnel have more opportunities to directly contact with foreign high-level clean room design, understanding of the world's advanced equipment and devices, management and maintenance, and so on. In this regard, it is true that there is a growing convergence with the international community from all angles.
China has also invested a lot of financial resources to develop microelectronics technology. In this stage has built the Shougang NEC Corporation, Huajing Electronics Group Corporation, Shanghai Huahong NEC Electronics Company, Shaoxing Huayue Microelectronics Company, and Tianjin MOTOROLA, Shanghai Beiling Microelectronics Company, etc., but in general microelectronics technology and the world's advanced level of production, especially on the level of research and development there is still a considerable gap.
Since the early nineties, clean technology in pharmaceutical factories to implement the GMP law has been popularized in the process, the country's thousands of pharmaceutical factories and the production of pharmaceutical raw materials, packaging materials and other non-pharmaceutical enterprises, one after another, the technological transformation. In 1992, China Pharmaceutical Industry Corporation (CPIC) and China Chemical and Pharmaceutical Industry Association (CCPIA) revised the "Guidelines for the Implementation of Good Manufacturing Practice (GMP)" issued in 1985, and issued a new implementation guideline. Subsequently in 1998 issued a step in line with international standards, by the State Drug Administration revised the organization of the "Good Manufacturing Practice", that is, China's 1998 GMP (implemented on August 1, 1999), for the implementation of GMP to increase the implementation of efforts to implement the certification system in the entire pharmaceutical industry to further lay the foundation. Since the early nineties, the construction of hospitals sterile operating room by the attention of all parties, one after another in major cities built thousands of 100,000 to 100 levels of different levels of bio-clean operating room, bio-clean rooms and experimental animal rooms.
Summary of the domestic clean technology industry in the past decade, according to the author's personal views are mixed. It is gratifying that the clean room technology industry in many aspects of the growing international standards, as reflected in the content of the relevant norms, clean room design ideas and programs, construction technology and management, testing methods and technology and so on. As reflected in China's national standards revision, November 13, 2001 release of GB50073-2001 national standards "clean plant design specifications" (Code for Design of Clean Room), in the air cleanliness level division, the clear equivalent of the international standard ISO14611-1, is a good example. Relying on the pharmaceutical industry and general electronics assembly industry, as well as medical and health care, food, cosmetics industry, clean room technology has been greatly popularized. However, these industries are basically ISO5 or Chinese standard N5 (equivalent to the original federal standard FED-STD-209E class 100) and the following levels of clean room, the main equipment and devices such as high-efficiency and all levels of filters, blowing room, purification workbench, air conditioning and refrigeration units, as well as the metal wall panels, floors, composite materials, etc., are basically domestic. Therefore, from the seventies only a few, mainly concentrated in the Beijing-Tianjin area, Shanghai area of more than a dozen; eighties the end of more than a hundred cleanroom equipment manufacturers, construction and installation units, the development of almost all provinces and cities throughout the country now thousands of cleanroom-related equipment, equipment manufacturing plants, construction and installation units, and a number of accumulated considerable experience in the design unit, debugging and testing units.
The country is in operation at various levels of clean room area, according to incomplete statistics and estimates, from the early eighties more than 100,000 square meters to more than 200 million square meters. Some microelectronics factory production workshop clean level reached 0.1 micron level 1 high level. In terms of theoretical calculation and experimental research on clean air flow pattern, Harbin Institute of Construction and Engineering, Tianjin University, and Air Conditioning Institute of Construction and Research Institute have adopted numerical simulation methods, utilized CFD (computational fluid dynamics) and experimental validation methods to carry out the research on vectorial flow pattern, arrangement of high-efficiency filters in general clean rooms and clean effects. He has participated in all the ICCCS international academic exchanges and published a number of research papers in the international arena.
Tianjin University and other organizations have participated in the system debugging, testing and acceptance of clean rooms of different cleanliness levels in MOTOROLA, SAE, KODA and CTS, which are designed by foreign countries, and constructed with foreign equipment and construction management technology. He has a deep understanding of the design points and technical keys of foreign microelectronics high-level clean rooms and pharmaceutical industry clean rooms, as well as commissioning and acceptance techniques and corresponding specifications, and has established extensive contacts with the U.S. FDA, NEBB, IEST, and Japan's JACA, etc. He has also worked as an expert in the design and construction of clean rooms in the pharmaceutical industry.
Specifically, it is worth mentioning that, under the active efforts of the new leaders of the Clean Technology Branch of the Chinese Institute of Electronics, China's bid to host the 18th International Conference on Contamination Control (2006) has been successful, which is the first time since the creation of the ICCCS in 1972 to organize such an event in China, and it will play an important role in promoting the progress of clean technology in China.