How many nanometers can a Korean lithography machine build

10nm. According to etnews, the EUV lithography machine at its M16 plant in Icheon, South Korea, can mass produce 10nm, 1a DRAM's, so South Korean lithography can make 10nm. A photolithography machine is a semiconductor manufacturing device used to make microelectronic components, using a special laser to create tiny patterns and motifs to make microelectronic components.